Poster Session

Poster Session I
Poster Session II

3D Printed Sensors and AI for Sensors

MP1

A 3D Printed Strain Sensor Employing Conductive TPU for Marine Applications
D.N. Pagonis^1,2, A. Stavros¹, I. Iakovidis¹, S. Dimitrellou¹, G. Kaltsas²

1. Department of Naval Architecture, University of West Attica, Egaleo 122 43, Athens, Greece
2. microSENSES Laboratory, Department of Electrical and Electronics Engineering, University of West Attica, Egaleo 122 44, Athens, Greece

MP2

Bayesian Inference for Reliable Gas Sensing with Metal-Oxide Sensors
Sebastian Pültz

Lab for Measurement Technology, Saarland University, 66123 Saarbrucken, Germany

Bio/Chemical and Environmental Sensors

MP3

Selective Formaldehyde Sensing: Unraveling Metal–Support Interaction Effects in Single-Atom Cu Catalysts
Hamin Shin, Andreas Güntner

Human-centered Sensing Laboratory, Department of Mechanical and Process Engineering, ETH Zürich, CH-8092, Zürich, Switzerland

MP4

PEDOT: PSS Gated Field-effect Transistor for Ion Sensing Applications
Xuan Thang Vu, Yiqian Zhang, Sven Ingebrandt

Institute of Materials in Electrical Engineering 1 (IWE1), RWTH Aachen University, Sommerfeldstr. 24, 52074 Aachen, Germany

MP5

(MgCoNiCuZn)O High-Entropy Oxide as Novel Gas Sensing Material
Iván Vergés Gazulla^1,2, Paolo Pellegrino^1,2, Guillem Domenech Gil^1,2,3, Albert Romano Rodriguez^1,2

1. Department of Electronic and Biomedical Engineering, University of Barcelona (UB), 08028 Barcelona, Spain
2. Institute of Nanoscience and Nanotechnology (IN2UB), University of Barcelona (UB), 08028 Barcelona, Spain
3. Department of Thematic Studies and Environmental Change, TEMA M, Linköping University, Sweden

MP6

Dependence of the Determination of Refractive Index Sensitivity of Plasmonic Sensors on the Calibration Method
Nóra Tarpataki^1,2, Tomáš Lednický³, Attila Bonyár^1,2

1. Department of Electronics Technology, Faculty of Electrical Engineering and Informatics, Budapest University of Technology and Economics, Egry József street 18, H-1111, Budapest, Hungary
2. Wigner Research Centre for Physics, Konkoly-Thege Miklós way 29-33, H-1121, Budapest, Hungary
3. Leibniz Institute of Photonic Technology, Albert-Einstein-Str. 9, 07745 Jena, Germany

MP7

Metal-Organic Framework (MOF)-based Materials for Electrochemical Sensing
C. Clemente^1,2, V. Gargiulo², L. Cimino², G.P. Pepe¹, G. Ausanio¹, M. Alfè²

1. Department of Physics of the University of Naples “Federico II”, Italy, 80125 Naples, Italy
2. Institute STEMS of the National Research Council of Italy (CNR), 80125 Naples, Italy

MP8

Dual-Channel Fluorescence Optical Sensor for Microplastic Detection and Polymer Classification
Yuliu Li¹, Valerio Allegra¹, Eleonora Nicolai², Roberto Pizzoferrato³, Corrado Di Natale¹, Alexandro Catini¹

1. Department of Electronic Engineering, University of Rome Tor Vergata, Via del Politecnico 1, 00133 Rome, Italy,
2. Departmental Faculty of Medicine, UniCamillus-Saint Camillus International University of Health Sci-ences, Via di Sant'Alessandro 8, Rome, Italy,
3. Department of Industrial Engineering, University of Rome Tor Vergata, Via del Politecnico 1, 00133 Rome, Italy

MP9

A Microfluidic System with Integrated Inkjet-printed Capacitive Sensors for biosensing Applications
Bruno Andò¹, Danilo Greco¹, Salvatore Castorina¹, Cosimo Trono², Sara Tombelli², Niccolò Marcucci², Mostafa Fytory², Maria Rachele Guascito³, Giuseppe Lamberti³, Laura Martina³, Nunzio Cennamo⁴

1. University of Catania (DIEEI), Catania, Italy
2. Consiglio nazionale delle Ricerche (Istituto di Fisica Applicata "Nello Carrara"), Firenze, Italy
3. University of Salento (DiSTeBA), Lecce, Italy
4. University of Campania "Luigi Vanvitelli" (Department of Engineering), Aversa, Italy

MP10

Application of ZnO–Imine Nanocomposites for Optical Detection of Metal Ions in Water
Iryna Tepliakova¹, Matiss Drava¹, Greta Zvirgzdine^2,3, Roman Viter¹

1. Institute of Atomic Physics and Spectroscopy, University of Latvia, Jelgavas Str.3, Riga, Latvia
2. Center for Physical Sciences and Technology, Savanorių Ave. 231, Vilnius, Lithuania
3. MB „SensoGrafa”, Kiparisu G. 29, Didžiosios Riešės k, Lithuania

MP11

Detection of Cerium(III) by Optimized Adsorption Stripping Voltammetry Using a New Electrochemical Sensor
Malgorzata Grabarczyk, Edyta Wlazlowska

Department of Analytical Chemistry, Institute of Chemical Sciences, Faculty of Chemistry, Maria Curie–Skłodowska University, Maria Curie–Skłodowska Sq. 3, 20–031 Lublin, Poland

MP12

Copper Film Electrode as an Electrochemical Sensor for the Determination of Trace Concentrations of Lead Ions in Environmental Waters by Anodic Stripping Voltammetry
Malgorzata Grabarczyk, Agnieszka Wawruch

Department of Analytical Chemistry, Institute of Chemical Sciences, Faculty of Chemistry, Maria Curie-Sklodowska University, Maria Curie-Skłodowska Sq. 5, 20-031 Lublin, Poland

MP13

Impedimetric Detection of COVID Proteins on Functionalized Boron Doped Diamond Electrodes – is the Redox Marker Necessary?
Adrian Olejnik, Robert Bogdanowicz

Department of Metrology and Optoelectronics; Faculty of Electronics, Telecommunications, and Informatics; Gdansk University of Technology; Narutowicza 11/12 St., Gdansk, Poland

MP14

The Effect of Perinone Polymer Potential Polymerization Range on its Effectiveness as a Solid Contact in Ion-Selective Electrodes
Cecylia Wardak, Klaudia Morawska

University of Maria Curie-Skłodowska, Faculty of Chemistry, Institute of Chemical Sciences, Department of Analytical Chemistry, Maria Curie-Sklodowska Sq. 3, 20-031 Lublin, Poland

MP15

Improving Analytical Parameters of Ammonium Potentiom-etric Sensors Using Carbon Nanocomposite
Cecylia Wardak, Klaudia Morawska

University of Maria Curie-Skłodowska, Faculty of Chemistry, Institute of Chemical Sciences, Department of Analytical Chemistry, Maria Curie-Sklodowska Sq. 3, 20-031 Lublin, Poland

MP16

Highly Sensitive Biosensor Platform Based on Substrate Bias Extended-Gate Field-Effect Transistor
Fuad Ughi¹, Elżbieta Remiszewska², Dorota G. Pijanowska², Chao-Sung Lai³, Chia-Ming Yang^4,5,6

1. Graduate Institute of Biomedical Engineering, Chang Gung University, Taoyuan, Taiwan
2. Institute of Biocybernetics & Biomedical Engineering, Polish Academy of Sciences, Warsaw, Poland
3. Institute of Pioneer Semiconductor Innovation, National Yang Ming Chiao Tung University, Hsinchu, Taiwan
4. Institute of Electro-Optical Engineering, Chang Gung University, Taoyuan, Taiwan
5. Department of Materials Engineering, Ming Chi University of Technology, New Taipei, Taiwan
6. Department of Neurosurgery, Chang Gung Memorial Hospital, New Taipei, Taiwan

MP17

Study Modification Parameters for Electrochemical Detection of Benzotriazole
Jelena Vujančević¹, Neža Sodnik^1,2, Melanija Hadolin^1,3, Zoran Samardžija¹, Kristina Žagar Soderžnik^1,2,3

1. Department for Nanostructured Materials, Jožef Stefan Institute, Jamova cesta 39, SI-1000 Ljubl-jana, Slovenia
2. Jožef Stefan International Postgraduate School, Jamova cesta 39, SI-1000 Ljubljana, Slovenia
3. Faculty of Chemistry and Chemical Technology, Večna pot 113, SI-1000 Ljubljana, Slovenia

MP18

Towards Polyamine Biosensors: Stabilizing Prussian Blue Electrodes with Polymers for Sensitive H₂O₂ Detection
Neža Sodnik^1,2, Giulia Della Pelle^1,2 and Kristina Žagar Soderžnik^1,2

1. Department for Nanostructured Materials, Jožef Stefan Institute, Jamova cesta 39, SI-1000 Ljubljana, Slovenia
2. Jožef Stefan International Postgraduate School, Jamova cesta 39, SI-1000 Ljubljana, Slovenia

MP19

Sensitivity Enhancement of LSPR Sensors on Flexible Glass Substrates through Bending-Induced Deformation
Chih-Ching Ho¹, Chia-Ming Yang^1,2,3, Nikhil Bhalla⁴

1. Institute of Electro-Optical Engineering, Chang Gung University, Taoyuan, Taiwan
2. Department of Electronic Engineering, Chang Gung University, Taoyuan, Taiwan
3. Department of Materials Engineering, Ming-Chi University of Technology, New Taipei City 243, Taiwan
4. Nanotechnology and Integrated Bioengineering Centre (NIBEC), School of Engineering, Ulster University, Shore Road, Jordanstown BT37 0QB, Northern Ireland, UK

MP20

A Photoelectrochemical Electrode of Electrodeposited Cu-prous Oxide on ITO/glass with Deposition Time Adjustment
Leung Sze Tsui¹, Iqra Shaheen², Marcin Urbanowicz³, Agnieszka Paziewska-Nowak³, Dorota G. Pijanowska³, Chia-Ming Yang^1,2,4,5,6

1. Institute of Electro-Optical Engineering, Chang Gung University, Taoyuan, Taiwan
2. Department of Electronic Engineering, Chang-Gung University, Taoyuan, Taiwan
3. Institute of Biocybernetics & Biomedical Engineering, Polish Academy of Sciences, Warsaw, Poland
4. Department of Neurosurgery, Chang Gung Memorial Hospital Linkou, Taoyuan, Taiwan
5. Department of Materials Engineering, Ming-Chi University New Taipei City 243, Taiwan
6. Department of Electronics Engineering, Ming-Chi University New Taipei City 243, Taiwan

Energy Harvesting for Sensors

MP21

Lead-Free Piezoelectric Vibration Energy Harvesters: Spark Plasma Sintered KNN Compared with Commercial KNN
Grégoire Forges^1,3, Nadia Bencharef^1,2, U-Chan Chung², Catherine Elissalde², David Gibus³, Hélène Debéda¹

1. Univ. Bordeaux, CNRS, Bordeaux INP, IMS, UMR 5218 F-33405 Talence Cedex, France
2. Univ. Bordeaux, CNRS, Bordeaux INP, ICMCB, UMR 5026, F-33600 Pessac, France
3. SYMME, Univ. Savoie Mont Blanc, F74000 Annecy, France

MP22

Optimal Design of Cantilever-type Vibro Harvester Working at Second Eigenfrequency
Paulius Skėrys, Dr. Rimvydas Gaidys, Dr. Birutė Narijauskaitė

Kaunas University of Technology, Studentų g. 56-344, Kaunas, Lithuania

MP23

Design of a Set-up for Measuring Magnetostrictive Materials without Strain Gauges to Assess the Magnitude of Villari Effect
Wojciech Pałka, Karolina Laszczyk

Wrocław University of Science and Technology, Faculty of Electronics, Photonics and Microsystems, Janiszewski Str. 11/17, 50-472 Wrocław, Poland

Gas Sensors

MP24

Nanoporous Materials for Light and Heat Activated Gas Sensing
Larissa Egger¹, Florentyna Sosada-Ludwikowska¹, Nigel Rising², Leandro Sacco², Anton Köck¹

1. Materials Center Leoben Forschung GmbH, Roseggerstrasse 12, 8700, Leoben, Austria
2. VSParticle, Oostsingel 209, 2612 HL, Delft, The Netherlands

MP25

Bi2O2CO3/CuO Micro-flowers with Abundant Oxygen Vacancies for Enhanced VOC Detection
Zichen Zheng^1,2, Kewei Liu¹, Yiwen Zhou¹, Carla Bittencourt², Chao Zhang¹

1. College of Mechanical Engineering, Yangzhou University, Yangzhou 225127, PR China
2. Chimie des Interactions Plasma-Surface, University of Mons, 7000 Mons, Belgium

MP26

Selective Benzene Sensing Enabled by Catalytically-Active Metastable Nanoparticles
Matteo D’Andria, Tiago Elias Abi-Ramia Silva, Andreas T. Güntner

Human-centered Sensing Laboratory, Department of Mechanical and Process Engineering, ETH Zürich, Switzerland

MP27

Single-Atom Metal Catalysts on Flame-Made Oxide Supports for Gas Sensing
Hamin Shin, Andreas Güntner

Human-centered Sensing Laboratory, Department of Mechanical and Process Engineering, ETH Zürich, CH-8092, Zürich, Switzerland

MP28

Enhancing Selectivity Through Fast Heater Cycles with MOx Sensors
Nik Dennler and Andreas Güntner

Human-centered Sensing Lab, ETH Zürich, Sonneggstrasse 3 8092 Zürich, Switzerland

MP29

Evaluation of a MEMS-based Absolute Humidity Sensor using Thermal Conductivity
Sophie Emperhoff^1,2, Matthias Eberl² and Jürgen Wöllenstein^1,3

1. Department of Microsystems Engineering (IMTEK), Albert-Ludwigs-Universit at Freiburg, 79110 Freiburg im Breisgau, Germany
2. Infineon Technologies AG, 81549 Neubiberg, Germany
3. Fraunhofer Institute for Physical Measurement Techniques, 79110 Freiburg im Breisgau, Germany

MP30

Electro-Optical Gas Sensing Characteristics of PEDOT:PSS Thin Films
Z. Hamzei, I. Gràcia, E. Figueras, S. Vallejos

Institute of Microelectronics of Barcelona (IMB-CNM, CSIC), Campus UAB, Barcelona

MP31

Ethanol Sensing at Room Temperature via ZnS Nanostructure-based Optical Approach
Houyem Trabelsi^1,2, Isabel Gràcia¹, Khaled Alouani², Carles Cané¹, Stella Vallejos¹

1. Institute of Microelectronics of Barcelona (IMB-CNM, CSIC), Barcelona, Spain
2. University of Tunis El Manar, Faculty of Science, Tunis, Tunisia

MP32

MoS 2 InSe Heterostructure Synthesized via Liquid Phase Exfoliation for NO2 Sensing
Jyayasi Sharma, Dalal Fadil, Eduard Llobet

Departament d’Enginyeria Electronica, Universitat Rovira i Virgili, Països Catalans 26, 43007 Tarragona, Spain

MP33

In-depth Characterisation of a Colorimetric Label for Formaldehyde Monitoring
María González-Gómez^1,2, Anna Zymohliad¹, Ismael Benito-Altamirano^1,3, Olga Casals¹, J. Daniel Prades², Cristian Fàbrega¹

1. MIND/IN2UB, Dept. of Electronics and Biomedical Engineering, University of Barcelona, Marti i Franqués 1, Barcelona, ES08028, Spain.
2. Institute of Semiconductor Technology (IHT), Laboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany.

MP34

Palladium Doped WSe2 for Gas Sensing Applications
Mubdiul Islam Rizu, Fatima Ezahra Annanouch, Jyayasi Sharma, Eduard Llobet

Departament d’Enginyeria Electronica, Universitat Rovira i Virgili, Avinguda Països Catalans 26, 43007 Tarragona, Spain

MP35

Development of Metallic inks for the Fabrication of a Flexible Metal Oxide Gas Sensors by Inkjet Printing Process
Le Porcher Bastien, Rieu Mathilde, Viricelle Jean-Paul

Mines Saint-Etienne, Univ Lyon, CNRS, UMR 5307 LGF, Centre SPIN, F-42023 Saint-Etienne, France

MP36

Hexagonal WO₃ Nanorods for Selective H₂S Detection: Synthesis, Characterization, and Gas Sensing Properties
Sarah Ben Haj Fraj¹, Viktor Zabolotnii², Martyn Sahul³, Roman Viter2, Ambra Fioravanti⁴, Giovanni Neri¹

1. Department of Engineering, University of Messina, C.da Di Dio, I-98166 Messina, Italy
2. Institute of Atomic Physics and Spectroscopy, University of Latvia, 19 Raina Blvd., Riga, LV 1586, Latvia
3. Slovak University of Technology in Bratislava, Faculty of Materials Science and Technology in Trnava, J. Bottu 25, 917 24 Trnava, Slovakia
4. Institute of Sciences and Technologies for Sustainable Energy and Mobility (STEMS), National Research Council (CNR), Via Canal Bianco, 28, 44124, Ferrara, Italy

MP37

Comparative Analysis of WO₃ Nanostructures for Chemoresistive Ammonia Sensing
Danial Ahmed¹, Elena Spagnoli¹, Matteo Ferroni^2,3, Giuseppe Cruciani¹, Vincenzo Guidi¹, Barbara Fabbri¹

1. Department of Physics and Earth Sciences, University of Ferrara, Ferrara, via Giuseppe Saragat 1/C, 44122, Italy
2. Department of Civil, Environmental, Architectural Engineering and Mathematics (DICATAM) – University of Brescia - Via Branze, 43 - 25123 Brescia, Italy
3. Institute for the Study of Nanostructured Materials - National Research Council (CNR-ISMN) Bologna - Via Gobetti, 101 - 40129 Bologna, Italy

MP38

Impedance Spectroscopy: A Key to More Selective and Reliable Chemoresistive Gas Sensors
Magoni Marco, Gaiardo Andrea, Matteo Valt, Pietro Tosato, Antonio Orlando and Riccardo Furlan

Sensors and Devices, Bruno Kessler Foundation, Via Sommarive 18, Povo (TN), Italy

MP39

Novel Multi Pixel-based Gas Sensor Fabricated by Local Inkjet Printing of Metal-oxides Structures
Alice Debot¹, Vincent Rogé¹, Hakimeh Pakdel², Dario Zappa², Sebastjan Glinsek¹, Stephanie Girod¹, Noureddine Adjeroud¹, Inci Boehme³, Renaud Leturcq¹

1. Luxembourg Institute of Science and Technology, 41 rue du Brill, L4422, Belvaux, Luxembourg,
2. University of Brescia, Sensor lab, Department of Information Engineering, 38 Via Branze, 25123 Brescia, Italy
3. Sciosense Germany GmbH, Gerhard-Kindler-Straße 8, 72770 Reutlingen, Germany

MP40

Novel Pyridinium Luminophores for Optical Ammonia Detection
Viktor Zabolotnii, Roman Viter, Matis Martins Drava, Artis Kinens

University of Latvia, 19 Raina Blvd., Riga, LV 1586, Latvia

MP41

H2S Sensor Studied by Electrochemical Impedance Spectroscopy
Krystyna Schneider, Barbara Dziurdzia, Katarzyna Zakrzewska

Faculty of Computer Science, Electronics and Telecommunications, AGH University of Krakow, 30-059 Krakow, Poland

MP42

Selectivity Acetone Detection by Spinel MnxOy Sensor
Reinaldo dos Santos Theodoro^1,2 ,Tiago Elias Abi-Ramia Silva², Matteo D’Andria², Diogo Paschoalini Volanti¹, Andreas T. Güntner2

1. São Paulo State University (UNESP), Rua Cristóvão Colombo 2265, 15054-000 São José do Rio Preto, Brazil
2. ETH Zurich, CH-8092 Zurich, Switzerland

MP43

Sub-ppm Methane Sensing by Spark-Ablation-Synthesized SnO2 Nanoparticle-based Materials
D. Gounaris¹, A. Baut2, S. E. Pratsinis¹, A. Güntner² , G. Biskos^1,3,4

1. Climate and Atmosphere Research Center, The Cyprus Institute, Nicosia, 2121, Cyprus
2. Human-centered Sensing Laboratory, Department of Mechanical and Process Engineering, ETH Zürich, 8092, Zürich, Switzerland
3. Faculty of Applied Sciences, Delft University, 2629 HZ Delft, the Netherlands
4. Faculty of Civil Engineering and Geosciences, Delft University of Technology, Delft, 2628-CN, the Netherlands

MP44

The Dimensionality of MOX Sensors in Air Quality assessment
Luiz Miranda¹, Nathalie Redon², Caroline Duc², Marie Verriele², Jugurta Montalv˜ao³, Bernadette Dorizzi¹, Mossaab Hariz¹, Dijana Petrovska¹, Jerome Boudy¹

1. Samovar, Télécom SudParis, Institut Polytechnique de Paris, Palaiseau, France
2. IMT Nord Europe, Institut Mines-Télécom, Univ. Lille, Center for Energy and Environment, Douai,France
3. Universidade Federal de Sergipe, UFS, São Cristóvão, Brazil

MP45

Experimental Characterization of Negative Temperature Coefficient Resistor Noise Depending on Polarization Voltage
Antoine Riaud

ABB Corporate Research, Baden-Dättwil, Switzerland

MP46

Investigations on Ammonia Using Resistive and Photoacoustic Sensor Elements
Heike Wünscher, Christoph Heinze, Steffen Herbst, Toni Schildhauer

CiS Forschungsintitut für Mikrosensorik GmbH Konrad-Zuse-Straße 14, 99099 Erfurt, Germany

MP47

Integration of MEMS-based Plasma Emission Sources in a Low Volume Flow Cell
Abelia Ellingsen, Karolina Milenko, Enrique Escobedo-Cousin, Do Chi Huong Hoang, Simone Zonetti, Alessandro Liberale, Elizaveta Vereshchangina

SINTEF Digital, Gaustadalléen 23C, Oslo, Norway

MP48

Morphology Dependent Response of SnO2 Gas Sensors from Spark Ablation, Spray Pyrolysis, and Sputter Coating Techniques
Nigel Rising,¹ Larissa Eggers² ,Leandro Sacco¹, Anton Köck², and C. Mitterer³

1. VSParticle, Oostsingel 209, 2612 HL, Delft, The Netherlands
2. Materials Center Leoben Forschung GmbH, Roseggerstrasse 12, 8700, Leoben, Austria
3. Department of Materials Science, Montanuniversit ÅN at Leoben, Franz-Josef-Stra.e 18, 8700 Leoben, Austria

Microfluidics

MP49

Voltage-Triggered Wetting in Bio-Inspired Microfluidic Channels
Michael Weiß^1,2, Werner Baumgartner¹, Bettina Heise³, Elisabeth Leiss-Holzinger³, Martin Kaltenbrunner⁴, Stefan Puttinger², and Gerda Buchberger¹

1. Institute of Biomedical Mechatronics, Johannes Kepler University Linz, Altenberger Str. 69, 4040 Linz, Austria
2. Department of Particulate Flow Modelling, Johannes Kepler University Linz, Altenberger Str. 69, 4040 Linz, Austria
3. Research Center for Non-Destructive Testing GmbH (RECENDT), Altenberger Strasse 69, 4040 Linz, Austria
4. Department of Soft Matter Physics, Johannes Kepler University Linz, Altenberger Str. 69, 4040 Linz, Austria

MP50

Numerical Investigation of Microfluidics Micromixer Inte-grated with Screw Element and Complex Micropillar Struc-ture for Enhanced Mixing
Muhammad Waqas, Arvydas Palevicius

Faculty of Mechanical Engineering and Design Kaunas University of Technology, Kaunas, Lithuania

MP51

Microgravity-induced Wet Chemical Etching of Borosilicate Glass – Towards Enhanced Microfabrication Methods
Kamil Baranowski, Marcin Białas, Agnieszka Krakos

Faculty of Electronics, Photonics and Microsystems, Wroclaw University of Science and Technology, Wrocław 27 Wybrzeże Stanisława Wyspiańskiego st., Poland

MP52

Rapid Microfluidic Hydrogel Imprint Based on CNT-induced Thermoresponsive Effect
Michał Żóltowski¹, Adrianna Cieślak², Agnieszka Krakos¹, Jerzy Detyna², Rafał Walczak¹

1. Department of Microsystems, Faculty of Electronics, Photonics and Microsystems, Wrocław University of Science and Technology, Wrocław, Poland,
2. Department of Mechanics, Materials and Biomedical Engineering, Faculty of Mechanical Engineering, Wrocław University of Science and Technology, Wrocław, Poland

Novel Technologies and Applications of Sensors

MP53

Plant Growth Monitoring Using Electromechanical Sensors
Benjamin Lehner, Alexander Stoiber, Florian Bauernfeind, Florian Stöger, Werner Baumgartner, Gerda Buchberger

Institute of Biomedical Mechatronics, Johannes Kepler University

MP54

Energy-Efficient Sensor System for Structural Wear Detection in Building Envelopes for Digital Twin and Predictive Analytics
Karl Giske, Soeren Hirsch

Brandenburg University of Applied Sciences, Magdeburger Strasse 50, 14770 Brandenburg/Havel,
Germany

MP55

C-V Measurement of Schottky Barrier LSMO/Nb:STO Heter-ostructure Dedicated to Optoelectronic Devices
Fallou Gning, Jeremy Blond, Victor Pierron, Laurence Méchin, Bruno Guillet

Caen Normandy University, ENSICAEN, CNRS, Normandy Univ., GREYC, UMR6072, F-14000 Caen, France

MP56

Inkjet-Printed PEDOT:PSS/ZnO Diodes on a Flexible Polyimide Substrate
Apostolos Apostolakis¹, Dimitris Barmpakos¹, Fadi Jaber^3,5, Konstantinos Aidinis^4,5, Dimitrios Nikolaos Pagonis^1,2, Grigoris Kaltsas¹

1. microSENSES Laboratory, Department of Electrical and Electronics Engineering, University of West Attica, Athens, Greece,
2. Department of Naval Architecture, University of West Attica, Egaleo 122 44, Athens, Greece,
3. Department of Biomedical Engineering, Ajman University, P.O. Box 346, Ajman, United Arab Emirates,
4. Department of Electrical and Computer Engineering, Ajman University, P.O. Box 346, Ajman, United Arab Emirates,
5. Center of Medical and Bio-allied Health Sciences Research, Ajman University, P.O. Box 346, Ajman, United Arab Emirates

MP57

Study of the Mmaterial Variability and Processing Techniques on White Light Photoluminescence Sensors Based on Porous Si, ZnO and Carbon Dots
Stavros Kiniklis^1,2, Nikoleta Chouchoumi^1,2, Niki Kagiara^1,2, Spyridon N. Katsantonis^1,3, Nikolaos Ganotis¹, Spiros Gardelis⁴, Konstantinos V. Kordatos³, Emmanouel Hourdakis^1,2, Christos Tsamis¹

1. Institute of Nanoscience and Nanotechnology / NCSR Demokritos, Patr. Grigoriou E’ & 27 Neapoleos Str., Aghia Paraskevi, 15341, Athens, Greece,
2. School of Electrical and Computer Engineering, National Technical University of Athens, 9 Iroon Polytechniou Str., 15772 Athens, Greece
3. Department of Chemical Sciences, School of Chemical Engineering, National Technical University of Athens, 9 Iroon Polytechniou Str., 15772 Athens, Greece
4. Condensed Matter Physics Section, Physics Department, National and Kapodistrian University of Athens (NKUA), Panepistimioupolis Zografos, 15784 Athens, Greece

MP58

Power Consumption Analysis of an OpenThread Border Router in a Wireless Sensor Network for Precision Agriculture
Andrea Buratti¹, Davide Polese², Alessandro Checco¹

1. Computer Science Department, University of Rome “La Sapienza”, Italy
2. Istituto per la Microelettronica e Microsistemi (IMM) Consiglio Nazionale delle Ricerche, Italy

MP59

UV- sensitive Hydrogel GelMA Filled with FeCo-PET Particles
Weronika Chuda¹, Mako Kobayashi², Karolina Laszczyk¹, Masaya Yamamoto²

1. Wrocław University of Science and Technology, Faculty of Electronics, Photonics and Microsystems, Janiszewskiego Str. 11/17, 50-372 Wrocław, Poland
2. Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi 980-8577, Japan

MP60

Thin-Film Strain Gauge Sensor to Determine the Difference Between Infill Cell Designs for the Sandwich Beams
Rafał Trzeciakowski, Rafał Pawłowski, Karolina Laszczyk, Paweł Piórkowski

Wrocław University of Science and Technology, Faculty of Electronics, Photonics and Microsystems, Janiszewskiego Str. 11/17, 50-372 Wrocław, Poland

MP61

Detection of Electron Beam in Atmospheric Pressure Using CMOS Image Sensor
Michał Krysztof¹, Kamil Baranowski¹, Michał Zychla¹, Matthias Hausladen², Rupert Schreiner², Aleksandr Knápek³

1. Faculty of Electronics, Photonics and Microsystems, Wroclaw University of Science and Technology, 11/17 Janiszewskiego St., 50-372 Wroclaw, Poland
2. Faculty of Applied Natural Sciences and Cultural Studies, OTH Regensburg, D-93053 Regensburg, Germany
3. Institute of Scientific Instruments of the Czech Academy of Sciences, Královopolská 147, 612 64 Brno, Czech Republic

Physical Sensors

MP62

Piezoresistive Pressure Sensors Based on ZrO₂ Substrate Fabricated by Photolithography and Inkjet Printing
Vojtěch Povolný, Alexandr Laposa, Jiří Kroutil

Czech Technical University in Prague, Department of Microelectronics, Technická 2, 16627 Praha 6, Czech Republic

MP63

Elastomer-based Flexible THz Metasurfaces for Sensing Applications
Andras Kovacs¹, Przemyslaw Lopato², Michal Herbko², Julien Petit¹, Benjamin Sittkus¹, Volker Bucher¹, Ulrich Mescheder^1,3

1. Furtwangen University, Robert Gerwig-Platz 1, 78120 Furtwangen im Schwarzwald, Germany
2. West Pomeranian University of Technology, ul. Sikorskiego 37, 70-313 Szczecin, Poland
3. Associated to the Faculty of Engineering, University of Freiburg, Freiburg, Germany

MP64

GNPs-Based Strain Sensors Derived from Recycled Cellulose Acetate: Fabrication and Analysis
Pegah Zarafshani¹, Fabrizia Cilento², Flavio Esposito¹, Lucia Sansone², Stefania Campopiano¹, Muhammad Zahid³, Abhishek Kumar³, Agostino Iadicicco¹, Michele Giordano²

1. Department of Engineering, University of Naples "Parthenope", 80143 Naples, Italy
2. Institute for Polymers, Composites and Biomaterials, National Research Council of Italy (IPCB-CNR), 80055 Portici, Italy
3. Quantum Technologies, Optronics and Material Laboratories, Leonardo SPA, 00195, Rome, Italy

MP65

Development of a Ferrofluidic Inclinometer Exploiting a Vision-based Readout Strategy
Bruno Andò, Danilo Greco, Salvatore Castorina, Alberto Campisi,

University of Catania (DIEEI), Catania, Italy

Quantum Sensors

MP66

A Calibration Method for Spatial Localization of OPM Sensors Based on a Rigid Coil Array Framework
Weinan Xu, Fuzhi Cao, Yong Li, Chunhui Wang, Xiaolin Ning

School of Instrumentation Science and Optoelectronic Engineering, Beihang University, Beijing 100191, P. R. China

MP67

Removal Method of Correlation Artifact Based on Reference Magnetic Signal
Yong Li¹, Hao Lu¹, Fuzhi Cao¹, Dawei Wang², Chunhui Wang¹, Xiaolin Ning¹

1. School of Instrumentation Science and Optoelectronic Engineering, Beihang University, Beijing 100191, P. R. China
2. Beijing Microelectronics Technology Institute, Beijing 100076,P. R. China

Theory, Modelling, Design and Testing

MP68

Comprehensive Mass Resolution Model for 2D Nanomechanical Resonant Sensors
Timothy Platten, Pengcheng Zhang and Christofer Hierold

Department of Micro- and Nanosystems, ETH Zürich, 8006 Zürich, Switzerland

MP69

Simulation and Optimization of Magnetic Field Actuated MEMS-Based Metasurface for Terahertz Applications
Barbara Grochowalska¹, Przemyslaw Lopato¹, Michal Herbko¹, Michal Maciusowicz¹, Grzegorz Psuj¹ ,Pranesh Kondamarri², Julien Petit², Andras Kovacs², Ulrich Mescheder²

1. West Pomeranian University of Technology, Szczecin, al. Piastow 17, Poland
2. Furtwangen University, Robert-Gerwig-Platz 1, 78120, Germany

MP70

Simulation Environment for Optimized Grating-Based Plasmon Couplers
Pongsak Sarapukee, Christian Spenner, Dirk Schulz and Stefan Palzer

Department of Electrical Engineering and Information Technology, Technical University Dortmund, Otto-Hahn-Straße 8, 44227 Dortmund, Germany

MP71

Time-integrated Sensing to Study Extreme Weather Events in Pulsed Pesticide Contamination
Namra Tariq¹, Chloe Martin¹, Fiona Regan¹, Hans-Jørgen Albrechtsen² ,Karolina Barbara Milenko-Kuszewska³

1. School of Chemical Sciences, DCU Water Institute, Dublin City University, Glasnevin, Dublin 9, Ire-land,
2. Denmark Technical University, Denmark,
3. SINTEF, Norway

MP72

Establishing a Raman Spectra Database for the Detection of Terbuthylazine Metabolites Using SERS-based Optical Sensors
Ioan-Alexandru Baragau¹, Oana Rasoga¹, Hans-Jørgen Albrechtsen², Konrad Gizynski³, Karolina Milenko⁴, Elizaveta Vereshchagina⁴, Jesil Jose⁴, Andreea Costas¹, Fiona Regan

1. National Institute of Materials Physics, 405 A, Atomistilor Street, P.O. Box M.G. 7, 077125 Magurele, Romania
2. Department of Environmental and Resource Engineering - DTU Sustain, Technical University of Denmark, Bygningstorvet, Building 115, DK - 2800 Kgs. Lyngby, Denmark
3. Institute of Physical Chemistry, Polish Academy of Sciences, Kasprzaka 44/52, 01-224 Warsaw, Poland
4. SINTEF Microsystems and Nanotechnology, Gaustadalleen 23C, 0737 Oslo, Norway

MP73

Optimization of Ultrasound Coupling for Clamp-on Flowmeters Using FEM Tools
Maximilian Schackmar¹, Achim Bittner¹, Alfons Dehé^1,2, Patrick Selle¹, Thilo Engel³, Thomas Hahn-Jose³, Axel Sikora^1,4

1. Hahn-Schickard-Gesellschaft für angewandte Forschung e.V., Wilhelm-Schickard-Str. 10, 78052 Villingen-Schwenningen, Germany
2. Georg H. Endress Chair of Smart Systems Integration, Department of Microsystems Engineering – IMTEK, Albert-Ludwigs-Universität Freiburg, Georges-Köhler-Allee 103, 79110 Freiburg, Germany
3. inoson GmbH, Sophie-Krämer-Straße 8, 66386 St. Ingbert
4. Institute of Reliable Embedded Systems and Communication Electronics (ivESK), Offenburg University, Badstrasse 24, 77652 Offenburg, Germany

Bio/chemical and Environmental Sensors

TP1

Nanowire Array Biosensor
Ashkhen Yesayan^1,2, Aleksandr Grabski^2,3

1. Swiss Federal Institute of Technology in Lausanne, 1015 Lausanne, Switzerland
2. Institute of Radiophysics and Electronics, Ashtarak, Armenia
3. MPSI, Paris-Saclay University, 91192 Gif-sur-Yvette, France

TP2

Dopamine Assessment on Conductive Polymers/gold NPs with Appended Metalloporphyrins Composites
Tahereh Rohani Bastami^1,2, Francesco Pizzoli¹, Fabrizio Caroleo¹, Sara Nardis¹, Roberto Paolesse¹, Larisa Lvova¹

1. Department of Chemical Sciences and Technology, University of Rome “Tor Vergata”, Rome, 00133, Italy
2. Department of Chemical Engineering, Faculty of Advanced Technologies, Quchan Univesity of Technology, Quchan 94771-77870, Iran

TP3

Benchmarking Surface Sensitivity of LSPR sensors: Comparison of Experimental Methods
Rebeka Kovács^1,2, Tomáš Lednický³, Mario Ziegler³, Attila Bonyár^1,2

1. Department of Electronics Technology, Faculty of Electrical Engineering and Informatics, Budapest University of Technology and Economics, Budapest, Hungary
2. Institute for Solid State Physics and Optics, HUN-REN Wigner Research Centre for Physics, Budapest, Hungary
3. Leibniz Institute of Photonic Technology, Albert-Einstein-Str. 9, 07745 Jena, Germany

TP4

The Importance of Surface Sensitivity in the Optimization of Plasmonic Sensors
Attila Bonyár^{1, 2}, Rebeka Kovács¹, Nóra Tarpataki¹, Tomáš Lednický³

1. Department of Electronics Technology, Faculty of Electrical Engineering and Informatics, Budapest University of Technology and Economics, Egry József street 18, H-1111, Budapest, Hungary
2. Wigner Research Centre for Physics, Konkoly-Thege Miklós way 29-33, H-1121, Budapest, Hungary
3. Leibniz Institute of Photonic Technology, Albert-Einstein-Str. 9, 07745 Jena, Germany

TP5

Metal Oxide – Schiff Base Nanofibers as Novel Optical Sensors for Different Metal Ion Detection in Aquatic Environment
Debleena Mandal¹, Magdalena Barwiolek¹, Dominika Jankowska¹, Anna Kaczmarek-Kędziera¹, Tadeusz M. Muzioł¹, Iryna Tepliakova², Roman Viter²

1. Faculty of Chemistry, Nicolaus Copernicus University in Torun, Gagarina 7, 87-100 Torun, Poland
2. Faculty of Physics, Mathematics and Optometry, University of Latvia, 19 Raina Blvd., Riga, LV 1586, Latvia

TP6

Two-Step Nanostructuring of Carbon Electrodes for Multiplexed Electrochemical Sensing Using Off-Axis MPECVD and Laser Micropatterning
Mattia Pierpaoli, Iwona Kaczmarzyk, Adrian Olejnik, Robert Bogdanowicz

Faculty of Electronics, Telecommunications and Informatics, Gdansk University of Technology, 11/12 Gabriela Narutowicza Street, Gdansk, 80-233, Poland

TP7

Metasurface Development for SERS-based Optical Sensors
Angela Mihaela Baracu¹, Adrian Dinescu¹, Karolina Milenko-Kuszewska², Oana Rasoga³, Ioan-Alexandru Baragau³

1. National Institute for Research and Development in Microtechnologies-IMT Bucharest, 126A, Erou Iancu Nicolae Street, 077190 Voluntari, Romania
2. SINTEF Microsystems and Nanotechnology, Gaustadalleen 23C, 0737 Oslo, Norway
3. National Institute of Materials Physics, 405 A Atomistilor Street, 077125 Magurele, Romania

TP8

Hydrogen Sensors for Oxygen
Nan Ma1, Zhifu Liu¹, Yunsong Li¹, Alexey Vasiliev^2,3, Oleg Kul³, Alexey Shaposhnik⁴, Mikhail Yablokov⁵

1. Shanghai Institute of Ceramics, Heshuo Road, 585, 2001899, Shanghai, P.R. China
2. Dubna State University, Universitetskaya str,19, Dubna, 141980, Russia
3. LLC “C-Component”, Tushinskaya str., 17, 125362, Moscow, Russia
4. Voronezh State Agrarian University, Michurin str., 1, 394087, Voronezh, Russia
5. Enikolopov Institute of Synthetic Polymeric Materials, Moscow, Profsoyuznaya 70, Russia

TP9

Electronic Circuit for Temperature and Humidity Measurements for the Purpose of the Mini Robot Caterpillar
Katarzyna Wilczewska, Alicja Musiał, Marcin Flak, Karolina Laszczyk

Wrocław University of Science and Technology, Faculty of Electronics, Photonics and Microsystems, Janiszewski Str. 11/17, 50-372 Wrocław, Poland

TP10

Colorimetric Detection of Cortisol Using an Alginate-Based Biosystem
Sepideh Izaddoust^1,2, Lourdes Basabe-Desmonts^2,3, Fernando Benito-Lopez²,

1. Microfluidics Cluster UPV/EHU, Analytical Microsystems & Materials for Lab-on-a-Chip Group, Ana-lytical Chemistry Department, University of the Basque Country UPV/EHU, Leioa, Spain
2. Microfluidics Cluster UPV/EHU, BIOMICs microfluidics Group, Lascaray Research Centre, University of the Basque Country UPV/EHU, Vitoria-Gasteiz, Spain
3. IKERBASQUE, Basque Foundation for Science, Bilbao, Spain

TP11

Direct-printed Amiodarone Electrochemical Sensor. Identification of DNA Based Bioreceptor
Marcin Urbanowicz¹, Magdalena Urbanowicz², Agnieszka Paziewska-Nowak¹, Kornelia Bobrowska¹, Anna Sołdatowska¹, Marek Dawgul¹, Dorota G. Pijanowska¹

1. Nalecz Institute of Biocybernetics and Biomedical Engineering, Polish Academy of Sciences, Ks. Trojdena 4 St., 02-109 Warsaw, Poland,
2. Falsified Medicines and Medical Materials Department, National Medicines Institute, Chełmska 30/34 St., 00–725 Warsaw, Poland

TP12

Sensitive Cell Identification in Impedance Flow Cytometry Using Optimized Dielectric Buffer Properties and Low Cost Microchannels
M. Favrod-Coune^1,2, O. Guenat³ and P. Eberle¹

1. Lucerne University of Applied Sciences, Switzerland
2. Graduate School for Cellular and Biomedical Sciences, University of Bern, Switzerland
3. University of Bern, ARTORG Center, Switzerland

TP13

Lens-free Microscope for Portable Pollen Grains Imaging System
Agus Budi Dharmawan^1,2, Georg Schöttler^1,2, Andreas Waag^1,2, J. Daniel Prades^1,2

1. Institute of Semiconductor Technology, Technische Universität Braunschweig, Hans-Sommer-Str. 66, 38106 Braunschweig, Germany
2. Laboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, Langer Kamp 6 a/b, 38106 Braunschweig, Germany

TP14

Recent Advances in Multiparameter 2D Chemical Imaging of Environmental Samples with Optical Sensors (Optodes)
Andrey V. Kalinichev^1,2, Martin R. Rasmussen¹, Klaus Koren¹

1. Aarhus University, Department of Biology, Ny Munkegade 116, 8000 Aarhus C, Denmark,
2. Aarhus University, Aarhus Institute of Advanced Studies, Høegh-Guldbergs Gade 6B, 8000 Aarhus C, Denmark

TP15

Fabrication and Characterization of Polymer-Based Ethanol Gas Sensor
Md Mayen Uddin, Mohammad Ariful Islam Bhuyan, Hyeon Cheol Kim

Department of Electrical, Electronic and Computer Engineering, University of Ulsan, 93 Daehak-ro, Nam-gu, Ulsan 680-749, South Korea

TP16

Influences on the Sensitivity of Camera-Based Colorimetric Gas Sensors Systems
Sonja Hoffmann^1,2, Sabine Trupp²

1. Fraunhofer EMFT, Hansastrasse 27d, 80686 Munich, Germany
2. Bundeswehr University Munich, Institute of Physics, Werner-Heisenberg-Weg 39, 85577 Neubiberg, Germany

TP17

Noble Metal Decorated Graphene Sensor for Detecting Hydrogen at Room Temperature
Padmanathan Karthick Kannan¹, Martin Tyler², Julian W. Gardner¹

1. School of Engineering, University of Warwick, Coventry CV4 7AL, United Kingdom
2. Paragraf, 7-8 West Newlands, Somersham, Cambridgeshire, England, PE28 3EB, United Kingdom

TP18

Al-doped ZnO Gas Sensors Toward Safe and Effective Monitoring in Protected Environments
Emanuela Tavaglione¹, Arianna Rossi¹, Matteo Ferroni², Vincenzo Guidi¹, Barbara Fabbri¹

1. Department of Physics and Earth Science, University of Ferrara, Via Giuseppe Saragat 1/C, 44122 Ferrara, Italy
2. Institute for Microelectronics and Microsystems IMM-CNR, Via Gobetti 101, 40129 Bologna, Italy

TP19

Field Calibration Strategies for Methane Monitoring with Electronic Noses
Guillem Domènech-Gil¹, Daniel Montecinos², Kalpana Munnuru Singamshetty¹, David Bastviken¹

1. Department of Thematic Studies and Environmental Change, TEMA M, Linköping university, Sweden
2. Current address: Department of Community Planning and Air Quality Unit, Swedish Meteorological, Hydrological Institute SMHI, Sweden

TP20

Rapid Detection of Olive Oil Markers Using a Gas Chromatography Sensor System
Omar Tarek Penagos Carrascal^1,3, Jan Bröckelmann², Tilman Sauerwald^1,3, Mark Bücking², Gina Zeh¹

1. Fraunhofer Institute for Process Engineering and Packaging IVV, Department of Sensory Analytics and Technologies, Giggenhauser Strasse 35, 85354, Freising, Germany
2. Fraunhofer Institute for Molecular Biology and Applied Ecology IME, Auf dem Aberg 1, 57392 Schmallenberg, Germany
3. Saarland University, Campus A5.1, 66123 Saarbrücken, Germany

TP21

Optimizing AC Excitation Frequency for Linear Complex Impedance Response in Metal Oxide Semiconductor Gas Sensing
Hamza Ali Imran, Oliver Brieger, Christian Bur and Andreas Schütze

Lab for Measurement Technology, Saarland University, Saarbrücken, Germany

TP22

Novel Pyridinium Luminophores as Optical Gas Sensors for Detection of Volatile Acids
Roman Viter, Viktor Zabolotnii, Matis Martins Drava and Artis Kinens

University of Latvia, 19 Raina Blvd., Riga, LV 1586, Latvia

TP23

A Novel IoT System for Highly-specific Gas Sensing Applied to Health Monitoring at Home
Ismael Benito-Altamirano^1,2, Omar Romera-Aller¹, María González-Gómez¹, Miquel Alfaras³, Zouhair Haddi³, Anaïs Espinoso³, José A. Sáez⁴ and Cristian Fàbrega¹

1. IN2UB, Department of Electronic and Biomedical Engineering, Universitat de Barcelona, 08028 Barcelona, Spain,
2. e-Health Center, Faculty of Computer Science, Multimedia and Telecommunications, Universitat Oberta de Catalunya, 08018 Barcelona, Spain
3. NVISION Systems and Technologies SL, 08028 Barcelona, Spain
4. Sensing&Control SL, 08028 Barcelona, Spain

TP24

Development of Wafer Sngulation Technique for MEMS and MOX Gas Sensors Using 355 nm UV Laser Ablation Process
Serguei Stoukatch, Francois Dupont, Jean-Michel Redouté

Microsys lab, Department of Electrical Engineering and Computer Science, Liege University, Allée de la Découverte 10, 4000 Liège, Belgium

TP25

Response of Silicon Nanowire Arrays to Humidity and Ammonia
M.T. Sultan¹, E. Fakhri¹, P. Powroznik², A. Kazmierczak-Balata², W. Jakubik², A. Manolescu¹ and H.G. Svavarsson¹

1. Department of Engineering, Reykjavik University, 102 Reykjavik, Iceland
2. Institute of Physics CSE, Silesian University of Technology, Konarskiego 22B, 44-100 Gliwice, Poland

TP26

Vacancy-Engineered MoS2 for Selective CO Sensing: A DFT Perspective on Intercalation
Dominik Florjan¹, Piotr Radomski² and Maciej J. Szary¹

1. Institute of Physics, Poznan University of Technology, ul. Piotrowo 3, 61-138 Poznan, Poland
2. Institute of Materials Research and Quantum Engineering, Poznan University of Technology, ul. Piotrowo 3, 61-138 Poznan, Poland

MEMS and MOEMS

TP27

On the Design of a Magnetically Driven Quasi-static MEMS Micromirror
Perla Malagò, Clement Fleury, Stefano Lumetti, Luiz Enger, Sara Guerreiro, Adrien Piot, Anton Lagosh

Silicon Austria Labs GmbH, Europastrasse 12, 9504 Villach, Austria

TP28

Design and Fabrication of Carbon Black Polymer Composite Based Pressure Sensor Array
Mohammad Ariful Islam Bhuyan, Md Mayen Uddin, Hyeon Cheol Kim

University of Ulsan, Ulsan, South Korea

TP29

Comprehensive Correlative Study of Post-treated Vertically Grown ZnO Nanowires
Tanisha Bhadauria^1,2, Nicolas Guillaume¹, Celine Ternon², Gustavo Ardila¹

1. Univ. Grenoble Alpes, Univ. Savoie Mont Blanc, CNRS, Grenoble INP, CROMA, F-38000 Grenoble, France.
2. Univ. Grenoble Alpes, CNRS, Grenoble INP, LMGP, F-38000 Grenoble, France

TP30

Sputter Deposited Aluminum Nitride for an Efficient Manufacturing of Piezoelectric Folded MEMS Membranes
Maria-Theresia Becker¹, Dennis Becker¹, Achim Bittner¹, Alfons Dehé^1,2

1. Hahn-Schickard-Gesellschaft für angewandte Forschung e.V., Wilhelm-Schickard-Str. 10, 78052 Villingen-Schwenningen, Germany
2. Georg H. Endress Chair of Smart Systems Integration, Department of Microsystems Engineering – IMTEK, Albert-Ludwigs-Universität Freiburg, Georges-Köhler-Allee 103, 79110 Freiburg, Germany

TP31

Modelling and Characterization of PZT-based High Performance PMUTs for In-Air Applications
Andreas Vogl¹, Guido Sordo¹, Ludvik Lidicky²

1. SINTEF Digital, Dep. Smart sensors and microsystems, Gaustadalléen 23c, 0373 Oslo, Norway
2. Elliptic Laboratories ASA, Hausmannsgate 21, 0182 Oslo, Norway

TP32

Study of the Possibility to Add Piezoelectric Sensors on Boat Hulls and Investigation of Shear Stress Caused by Drag
Guillaume Cayla¹, Peter D. Folkow¹,Vincent Udén², Henrik Staaf², Cristina Rusu², Alex A. Shiri³ and Michael Leer-Andersen³

1. Chalmers University of Technology, Hörsalsvägen 7, 412 58 Göteborg, Sweden
2. Research institute of Sweden, Lindholmsallén 10, 417 55 Göteborg, Sweden
3. SSPA Sweden AB, Chalmers Tvärgata 10, 400 22 Göteborg, Sweden

TP33

Snap-through Mode Shape Reconstruction of Bistable PiezoMEMS Membranes through Parametric Exploration
Mahdi Mortada^{1, 2}, Matthias Schlögl ¹, Ulrich Schmid¹, Michael Schneider^{1, 2}

1. Institute of Sensor and Actuator Systems, TU Wien, Austria
2. Christian Doppler Laboratory for Piezoelectric Silicon MEMS with Enhanced Sensitivity and Responsivity, Institute of Sensor and Actuator Systems, TU Wien, Austria

Novel Technologies and Applications of Sensors

TP34

Ultra-Stable Few-Layer Black Phosphorus UV Detector Encapsulated in Nitrocellulose
Michał Suplewski, Małgorzata Szczerska, Paweł Jakóbczyk

Department of Metrology and Optoelectronics, Faculty of Electronics, Telecommunications and Informatics, Gdansk University of Technology, Gabriela Narutowicza 11/12, 80-233 Gdansk, Poland

TP35

Orthogonality Characterization of 3D Helmholtz Coil Fields
Peter Leitner¹, Florian Slanovc¹, Luiz Enger¹, Michael Ortner¹, Stephan Leisenheimer², Cristina-Georgia Iot³, Catalina-Petruta Juglan³, Mihai Iatco³, Mihai Muntean³

1. Silicon Austria Labs GmbH, Sandgasse 34, 8010 Graz, Austria
2. Infineon Technologies AG Neubiberg, Am Campeon 1-15, 85579 Neubiberg, Germany

TP36

A Lightweight Method for Interconnecting Sensors via Power Line Communication
Martin Brandl, Karlheinz Kellner

Department for Integrated Sensor Systems, University for Continuing Education Krems, 3500 Krems, Austria

TP37

Tracking Fish Trajectories Through Dynamic Pressure Signals: A Dual-Sensor System for Hydrodynamic Cues Monitoring
C. Porcon, B. Lagneaux, F. Razan1, G. Jodin

Univ. Rennes, ENS Rennes, CNRS, IETR - UMR 6164, F-35000 Rennes, France

TP38

Enhancing Stability of Few-Layer Black Phosphorus via Nitrocellulose Encapsulation for Optoelectronic Applications
Jakub Gierowski, Michał Suplewski, Paweł Jakóbczyk, Małgorzata Szczerska

Department of Metrology and Optoelectronics, Faculty of Electronics, Telecommunications and Informatics,Gdansk University of Technology, Gabriela Narutowicza 11/12, 80-233 Gdansk, Poland

Physical Sensors

TP39

Nanoimprint Lithography for Multiple Cavity Height Fabry-Perrot Filter Array from Two-level Master
Clement Fleury¹, Benjamin Kalas¹, Bernardo Realista-Ferreira¹, Raveendra Nallagatla¹, Munir Azeem¹, Patrick Schuster², Marco Preuß², Vivien Lingel², Manu Garg¹, Bharathkumar Mareddi¹, Thang Duy Dao¹

1. Silicon Austria Labs GmbH, Sandgasse 34, 8010 Graz, Austria,
2. EV Group E. Thallner GmbH, DI Erich Thallner Str. 1, 4782 St. Florian am Inn, Austria

TP40

Detection of Butyric Acid Concentration in Aqueous Solution Towards Intraruminal Volatile Fatty Acid Measurement
Jarred Fastier-Wooller, Daiki Yamaguchi, Shun Muramatsu, Michitaka Yamamoto, Toshihiro Itoh

Dept. Precision Engineering, Graduate School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, 113-8656, Tokyo, Japan

TP41

Flip Chip Bonding of Bare Die on a Flexible PET Substrate with Ablated Copper
Muhammad Hassan Malik¹, Asaf Levy⁴, Mani Teja Vijjapu¹, Emily Bezerra^1,2, Carolin Kollegger³, Sabine Lengger Thomas¹, Thomas Herndl2Herndl³, Carolin Kollegger ², Effi Dvash^3,4, Asaf Levy³Mani Teja Vijjapu¹

1. Silicon Austria Labs, Europastrasse 12, A-9524 Villach, Austria,
2. Laboratory of Bio/CMOS Interfaces, École Polytechnique Fédérale de Lausanne (EPFL), Neuchâtel, Switzerland
3. Infineon Technologies Austria AG, Babenbergerstraße 10, A-8020 Graz, Austria
4. KLA Corporation, P.O. Box 215, Yavne 81101, Israel

TP42

Biological Transistor (bioFET) for the Specific and Label-free Sensing of CRP in Unprocessed Blood
Shubham Babbar¹, Avital Eisenberg-Lerner², Ziv Rotfogel^2,3, Evgeny Pikhay⁴, Inna Shehter⁴, Ayala Elkayam⁴, Muhammad Y. Bashouti⁵, Barak Akabayov⁶, Izhar Ron¹, Guy Hazan^7,8, Yakov Roizin⁴, Gil Shalev^1,5

1. School of Electrical Engineering, Ben-Gurion University of the Negev, Israel
2. Ophthalmology Research Laboratory, Kaplan Medical Center, Rehovot, Israel
3. Faculty of Medicine, Hadassah Medical School, The Hebrew University of Jerusalem, Jerusalem, Israel
4. Tower Semiconductor, PO Box 619, Migdal Haemek, Israel
5. The Ilse-Katz Institute for Nanoscale Science and Technology, Ben-Gurion University of the Negev, POB 653, Beer-Sheva 8410501, Israel
6. Department of Chemistry and Data Science Research Center, Ben-Gurion University of the Negev, 8410501, Beer-Sheva, Israel
7. School of Medicine, Faculty of Health Sciences, Ben-Gurion University of the Negev, Beer-Sheva, Israel

TP43

Novel Gating Mechanism Employed on Nano Bio-FET Towards Real-time, Point-of-care Diagnostics in Human Whole Blood
Vijay Garika¹, Shankar Bhattarai⁸, Sherina Harilal², Avital Eisenberg-Lerner³, Ziv Rotfogel^3,4, Evgeny Pikhay⁵, Inna Shehter⁵, Ayala Elkayam⁵, Muhammad Y. Bashouti^2,6, Barak Akabayov⁷, Izhar Ron¹, Yakov Roizin⁵, Vladimir Bamm⁸, Melanie Wills⁸, Gil Shalev^1,6

1. School of Electrical Engineering, Ben-Gurion University of the Negev, Israel.
2. Department of Solar Energy and Environmental Physics, Swiss Institute for Dryland Environmental and Energy Research, J. Blaustein Institutes for Desert Research, Ben-Gurion University of the Negev, Midreshet Ben-Gurion 8499000, Israel.
3. Ophthalmology Research Laboratory, Kaplan Medical Center, Rehovot, Israel.
4. Faculty of Medicine, Hadassah Medical School, The Hebrew University of Jerusalem, Jerusalem, Israel.
5. Tower Semiconductor, PO Box 619, Migdal Haemek, Israel
6. The Ilse-Katz Institute for Nanoscale Science and Technology, Ben-Gurion University of the Negev, POB 653, Beer-Sheva 8410501, Israel.
7. Department of Chemistry and Data Science Research Center, Ben-Gurion University of the Negev, 8410501, Beer-Sheva, Israel.
8. Department of Molecular and Cellular Biology, University of Guelph, 50 Stone Road East, Guelph, Ontario, Canada

TP44

Approximation of Temperature Characteristics of Seebeck Coefficients for CuNi-Ag and Ca3Co4O9-Ag Thermopiles
Szymon Wójcik, Andrzej Dziedzic

Wrocław University of Science and Technology, Faculty of Electronics, Photonics and Microsystems, Janiszewski St. 11/17, 50-372 Wrocław, Poland

TP45

MEMS Based Field Mill for Measuring Hybrid Electric Fields
Wilfried Hortschitz ¹, Gabor Kovacs¹ and Franz Keplinger²

1. Department for Integrated Sensor Systems, University for Continuing Education Krems, Viktor Kaplan Str. 2E, A2700 Wiener Neustadt
2. Institute of Sensor and Actuator Systems, Technische Universit ÅN at Wien,Gusshausstrasse 27-29, A1040 Vienna

TP46

A High-Sensitivity Co-Oscillating Electrochemical Vector Hydrophone Based on Micron-Scale Controllable Microelectrodes
Honghao Zhang^1,2, Junbo Wang^1,2, Deyong Chen^1,2, Yulan Lu^1,2

1. Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
2. University of Chinese Academy of Sciences, Beijing 100049, China

TP47

Performance Improvement of Resonant Absolute Pressure Sensors Based on Topology Optimization and Suspension Design
Xiaohan Liu^1,2, Bo Xie^1,2, Junbo Wang^1,2, Deyong Chen^1,2,Yulan Lu^1,2,Bowen Tan^1,2, Xingyu Li^1,2, Zhaoyaun Tan^1,2

1. State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100049, China，
2. School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences; Beijing 100049, China

TP48

Novel Acoustic Method for Detecting Fluid Phase Boundaries
Marcel Kamrad¹, Jens Rautenberg², Leonhard Reindl¹, Katrin Schmitt¹ and Jürgen Wöllenstein¹

1. University of Freiburg, Department of Microsystems Engineering - IMTEK, Georges-KÅN ohler-Allee 102,79110 Freiburg Germany
2. Endress+Hauser Flow Deutschland GmbH, Rosenauer Str. 27, 96450 Coburg, Germany

TP49

Measurement of Vacuum Pressure with Resonators in the Closed-Loop Configuration
Jiaxin Qin^1,2, Xiaohan Liu^1,2, Junbo Wang^1,2, Deyong Chen^1,2, Bo Xie^1,2, Yulan Lu^1,2, Xiaoye Huo^1,2

1. Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing, 100094, China
2. School of Electronic, Electrical and Communication Engineering, University of Chinese Academy ofSciences, Beijing, 100049, China

TP50

Wearable Multi-Modal Sensor Array with Wireless Communication for Monitoring Medical Bandage Condition
István Bársony¹, János Bozorádi¹, Ferenc Braun¹, Gábor Battistig¹, Péter Földesy², Péter Fürjes¹

1. HUN-REN Centre for Energy Research, Konkoly-Thege str. 29-33., H-1121 Budapest, Hungary
2. HUN-REN SZTAKI, Kende u. 13-17., H-1111 Budapest, Hungary

TP51

Integrating Carbon Nanotube Strain Gauges onto Stretchable PDMS Patches for Respiration Activity Sensing
Stefanie Jucker, Morten Vollmann, Cosmin Roman, Signe Lin Vehusheia, Mainak Basu, Christofer Hierold

ETH Zurich, Tannenstrasse 3, 8092 Zürich, Switzerland

Sensors for Automation and Industry

TP52

Dielectric Mass Concentration and Moisture Sensing of Organic Powders in Industrial Sensors
T. Schwar¹, M. Neumayer¹, T. Suppan¹, J. Dornhofer¹, T. Bretterklieber¹, H. Wegleiter¹, C. Feilmayr² and S. Schuster²

1. Institute of Electrical Measurement and Sensor Systems, Inffeldgasse 23/II, A-8010 Graz, Austria
2. voestalpine Stahl GmbH, voestalpine-Stra.e 3, Linz, 4020, Austria

TP53

A Shunt Based Low Frequency Current Sensing Approach at an Earthing Switch for Power Grid Applications
A. Elsässer¹, M. Neumayer¹, B. Schweighofer¹, T. Bretterklieber¹, F. Grubinger ¹, P. Schachinger² and H. Wegleiter¹

1. Institute of Electrical Measurement and Sensor Systems, Inffeldgasse 23/II, A-8010 Graz, Austria
2. Austrian Power Grid AG, Wagramerstra.e 19, A-1220 Vienna, Austria

TP54

Low Cost Level Sensing for Receivers in Small Sized Refrigeration Systems with Natural Refrigerants
M. Neumayer¹, G. Pertiller², F. Eder², R. Rieberer²

1. Institute of Electrical Measurement and Sensor Systems, Graz University of Technology, Inffeldgasse 23/II, A-8010 Graz, Austria
2. Institute of Thermal Engineering, Graz University of Technology, Inffeldgasse 25B, A-8010 Graz, Austria

TP55

Limitations of LWIR Cameras for Industrial Air Leak Detection
Klaus Lex^1,2, Thilo Sauter^1,2 and Hubert Brückl¹

1. Department of Integrated Sensor Systems, University of Continuing Education Krems, Viktor Kaplan Stra.e 2 - Bauteil E, 2700 Wiener Neustadt, Austria
2. TU Wien, Karlsplatz 13, 1040 Vienna, Austria

TP56

Experimental Analysis of Flat Spot-Induced Vibrations Using Piezoelectric IEPE-Accelerometers
Philipp Kersten, Christian Engel, Soeren Hirsch

University of Applied Sciences Brandenburg, Magdeburger Straße 50, 14770 Brandenburg an der Havel, Deutschland

TP57

Blind Prediction of Odor Concentration in Deodorization Process in Wastewater Treatment Plant Using E-nose and Dynamic Olfactometry
Isabelle Crosnier¹, Assia Nevers¹, Fida Maalem¹, Madani Diallo¹, Fabien Siinoa¹, Vincent Bourges¹, Fatma Ayouni², Jean-Christophe Mifsud² ,Ivan Romanytsia²

1. SIAAP Direction des Laboratoires et de l’Environnement, Service Environnement, France
2. ELLONA SAS 3 Avenue Didier Daurat, 31400 Toulouse, France

TP58

A Novel Surface Recognition System Using an Artificial Finger
Alireza Abbasimoshaei, Alhussein Mohamed Hazem Osman, Fady Youssef, Thorsten A. Kern

Hamburg University of Technology, Institute for Mechatronics in Mechanics, Hamburg, Germany

TP59

Adaptive Algorithm for Microsensor in Sustainable Environmental Monitoring
Nursultan Daupayev, Christian Engel, Ricky Bendyk, Prof. Dr.-Ing. Sören Hirsch

Brandenburg University of Applied Science, Department of Engineering, Magdeburger Str. 50, 14770 Brandenburg/Havel, Germany

TP60

Sensor Density Optimization of Active Magnetic Shielding System Based on Monte Carlo Simulation
Haofan Wang^1,3, Yuning Wu^1,3, Daiyong Chen², Rui Feng^1,3, Bangcheng Han^1,3

1. School of Instrumentation and Optoelectronic Engineering, Beihang University, Beijing,100191, China
2. Institute of Large-scale Scientific Facility and Centre for Zero Magnetic Field Science, Beihang University, Beijing 100191, China
3. Hangzhou Institute of Extremely-Weak Magnetic Field Major National Science and Technology Infrastructure, Hangzhou, 310028, China

Sensors for Medicine and Life-Sciences

TP61

Selective Breath Acetone Detection for Metabolic Health Monitoring
Jaehyun Ko, Andreas Güntner

Human-centered Sensing Lab, Department for Mechanical and Process Engineering, ETH Zürich, Switzerland

TP62

Rapid and Sensitive MiRNA Detection in Biofluids Using Ultra Microelectrode Sensors
Marcello Valente¹, Md. A. Ridwan¹, John Browne², Javier Higes Marques¹, K. G, Meade^2,3, A. O’Riordan¹

1. Tyndall National institute, UCC, Cork, Ireland
2. UCD School of Agriculture and Food Science, University College Dublin, Belfield, D04 V1W8, Dublin, Ireland
3. UCD Conway Institute of Biomolecular and Biomedical Research, University College Dublin, Belfield, D04 V1W8, Dublin, Ireland

TP63

Direct-printed, Solid-contact pH Sensor for Clinical Applications: Challenges of Non-specific Adsorption
Marcin Urbanowicz¹, Agnieszka Paziewska-Nowak¹, Kornelia Bobrowska¹, Anna Sołdatowska¹, Marek Dawgul¹, Marcin Ekman², Dorota G. Pijanowska¹

1. Nalecz Institute of Biocybernetics and Biomedical Engineering, Polish Academy of Sciences, Ks. Trojdena 4 St., 02-109 Warsaw, Poland,
2. Department of Surgical Oncology, Transplant Surgery and General Surgery, Medical University of Gdańsk, Poland

TP64

DNA-6MP Interactions for Electrochemical Biosensor Development
Anna Sołdatowska¹, Marcin Urbanowicz¹, Magdalena Urbanowicz², Kamila Sadowska¹, Dorota G. Pijanowska¹

1. Nalecz Institute of Biocybernetics and Biomedical Engineering, Polish Academy of Sciences, Ks. Trojdena 4 St., 02-109 Warsaw, Poland,
2. Falsified Medicines and Medical Materials Department, National Medicines Institute, Chełmska 30/34 St., 00-725 Warsaw, Poland

TP65

Electrochemical Detection of Cortisol Using Carbon Nanotubes (CNT) Modified with a Pyrene Derivative
Ana R. Santos¹, Fátima Bento², Bruno Faria¹, Maria C. Paiva¹, Alexandre F. Silva³, Júlio C. Viana¹

1. IPC – Institute for Polymers and Composites, University of Minho, Campus de Azurém, 4800-058 Guimarães, Portugal
2. CQ-UM – Chemistry Research Centre of the University of Minho, Campus de Gualtar, 4710-057 Braga, Portugal
3. CMEMS – Center for Microelectromechanical Systems, University of Minho, Campus de Azurém, 4800-058 Guimarães, Portugal

TP66

Force Measurement in Laparoscopic Stapler for Ex-Vivo Tissue Characterization
János Márk Bozorádi^1,2, Zsófia Sz Bérces¹, Géza Papp³, Maria Berkes Maros², Péter Fürjes¹

1. Microsystems Lab., Inst. of Technical Physics and Materials Science, HUN-REN Centre for Energy Research, Budapest, Hungary
2. Óbuda University Doctoral School on Materials Sciences and Technologies, Budapest, Hungary
3. Uzsoki Hospital, Budapest, Hungary

TP67

Design of Soft and Fast Nanocantilever for High-Speed Atomic Force Microscopy
Eying Sim Wong¹, Aron Michael¹, Hemanshu Pota², Chee Yee Kwok¹

1. UNSW Sydney, High St, Kensington, Sydney NSW, Australia
2. UNSW Canberra, Northcott Drive, Campbell ACT, Australia

TP68

Microphysiological Analytical Chip with Non-invasive Raman Microspectroscopy Analysis of Epithelial Permeability and Inflammatory Biomarkers
Calogiuri A., Bellisario D., Sciurti E., Blasi L., Esposito V., Casino, F., Siciliano P., Francioso L.

Institute for Microelectronics and Microsystems IMM-CNR, Via per Monteroni “Campus Ecotekne”, 73100 Lecce, Italy

TP69

Fully Integrated Sensor Platform for Remote Respiratory Biomarker Monitoring (15min)
Simon Schlapansky, Federico Burisch, Ryan Rusch, Andreas Güntner

1. Department of Naval Architecture, University of West Attica, Egaleo 122 43, Athens, Greece 2. microSENSES Laboratory, Department of Electrical and Electronics Engineering, University of West Attica, Egaleo 122 44, Athens, Greece

Lab for Measurement Technology, Saarland University, 66123 Saarbrucken, Germany

Human-centered Sensing Laboratory, Department of Mechanical and Process Engineering, ETH Zürich, CH-8092, Zürich, Switzerland

Institute of Materials in Electrical Engineering 1 (IWE1), RWTH Aachen University, Sommerfeldstr. 24, 52074 Aachen, Germany

1. Department of Physics of the University of Naples “Federico II”, Italy, 80125 Naples, Italy 2. Institute STEMS of the National Research Council of Italy (CNR), 80125 Naples, Italy

1. University of Catania (DIEEI), Catania, Italy 2. Consiglio nazionale delle Ricerche (Istituto di Fisica Applicata "Nello Carrara"), Firenze, Italy 3. University of Salento (DiSTeBA), Lecce, Italy 4. University of Campania "Luigi Vanvitelli" (Department of Engineering), Aversa, Italy

1. Institute of Atomic Physics and Spectroscopy, University of Latvia, Jelgavas Str.3, Riga, Latvia 2. Center for Physical Sciences and Technology, Savanorių Ave. 231, Vilnius, Lithuania 3. MB „SensoGrafa”, Kiparisu G. 29, Didžiosios Riešės k, Lithuania

Department of Analytical Chemistry, Institute of Chemical Sciences, Faculty of Chemistry, Maria Curie–Skłodowska University, Maria Curie–Skłodowska Sq. 3, 20–031 Lublin, Poland

Department of Analytical Chemistry, Institute of Chemical Sciences, Faculty of Chemistry, Maria Curie-Sklodowska University, Maria Curie-Skłodowska Sq. 5, 20-031 Lublin, Poland

Department of Metrology and Optoelectronics; Faculty of Electronics, Telecommunications, and Informatics; Gdansk University of Technology; Narutowicza 11/12 St., Gdansk, Poland

University of Maria Curie-Skłodowska, Faculty of Chemistry, Institute of Chemical Sciences, Department of Analytical Chemistry, Maria Curie-Sklodowska Sq. 3, 20-031 Lublin, Poland

University of Maria Curie-Skłodowska, Faculty of Chemistry, Institute of Chemical Sciences, Department of Analytical Chemistry, Maria Curie-Sklodowska Sq. 3, 20-031 Lublin, Poland

1. Department for Nanostructured Materials, Jožef Stefan Institute, Jamova cesta 39, SI-1000 Ljubljana, Slovenia 2. Jožef Stefan International Postgraduate School, Jamova cesta 39, SI-1000 Ljubljana, Slovenia

1. Univ. Bordeaux, CNRS, Bordeaux INP, IMS, UMR 5218 F-33405 Talence Cedex, France 2. Univ. Bordeaux, CNRS, Bordeaux INP, ICMCB, UMR 5026, F-33600 Pessac, France 3. SYMME, Univ. Savoie Mont Blanc, F74000 Annecy, France

Kaunas University of Technology, Studentų g. 56-344, Kaunas, Lithuania

Wrocław University of Science and Technology, Faculty of Electronics, Photonics and Microsystems, Janiszewski Str. 11/17, 50-472 Wrocław, Poland

1. Materials Center Leoben Forschung GmbH, Roseggerstrasse 12, 8700, Leoben, Austria 2. VSParticle, Oostsingel 209, 2612 HL, Delft, The Netherlands

1. College of Mechanical Engineering, Yangzhou University, Yangzhou 225127, PR China 2. Chimie des Interactions Plasma-Surface, University of Mons, 7000 Mons, Belgium

Human-centered Sensing Laboratory, Department of Mechanical and Process Engineering, ETH Zürich, Switzerland

Human-centered Sensing Laboratory, Department of Mechanical and Process Engineering, ETH Zürich, CH-8092, Zürich, Switzerland

Human-centered Sensing Lab, ETH Zürich, Sonneggstrasse 3 8092 Zürich, Switzerland

1. Department of Microsystems Engineering (IMTEK), Albert-Ludwigs-Universit at Freiburg, 79110 Freiburg im Breisgau, Germany 2. Infineon Technologies AG, 81549 Neubiberg, Germany 3. Fraunhofer Institute for Physical Measurement Techniques, 79110 Freiburg im Breisgau, Germany

Institute of Microelectronics of Barcelona (IMB-CNM, CSIC), Campus UAB, Barcelona

1. Institute of Microelectronics of Barcelona (IMB-CNM, CSIC), Barcelona, Spain 2. University of Tunis El Manar, Faculty of Science, Tunis, Tunisia

Departament d’Enginyeria Electronica, Universitat Rovira i Virgili, Països Catalans 26, 43007 Tarragona, Spain

1. MIND/IN2UB, Dept. of Electronics and Biomedical Engineering, University of Barcelona, Marti i Franqués 1, Barcelona, ES08028, Spain. 2. Institute of Semiconductor Technology (IHT), Laboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany.

Departament d’Enginyeria Electronica, Universitat Rovira i Virgili, Avinguda Països Catalans 26, 43007 Tarragona, Spain

Mines Saint-Etienne, Univ Lyon, CNRS, UMR 5307 LGF, Centre SPIN, F-42023 Saint-Etienne, France

Sensors and Devices, Bruno Kessler Foundation, Via Sommarive 18, Povo (TN), Italy

1. Luxembourg Institute of Science and Technology, 41 rue du Brill, L4422, Belvaux, Luxembourg, 2. University of Brescia, Sensor lab, Department of Information Engineering, 38 Via Branze, 25123 Brescia, Italy 3. Sciosense Germany GmbH, Gerhard-Kindler-Straße 8, 72770 Reutlingen, Germany

University of Latvia, 19 Raina Blvd., Riga, LV 1586, Latvia

Faculty of Computer Science, Electronics and Telecommunications, AGH University of Krakow, 30-059 Krakow, Poland

1. São Paulo State University (UNESP), Rua Cristóvão Colombo 2265, 15054-000 São José do Rio Preto, Brazil 2. ETH Zurich, CH-8092 Zurich, Switzerland

1. Samovar, Télécom SudParis, Institut Polytechnique de Paris, Palaiseau, France 2. IMT Nord Europe, Institut Mines-Télécom, Univ. Lille, Center for Energy and Environment, Douai,France 3. Universidade Federal de Sergipe, UFS, São Cristóvão, Brazil

ABB Corporate Research, Baden-Dättwil, Switzerland

CiS Forschungsintitut für Mikrosensorik GmbH Konrad-Zuse-Straße 14, 99099 Erfurt, Germany

SINTEF Digital, Gaustadalléen 23C, Oslo, Norway

1. VSParticle, Oostsingel 209, 2612 HL, Delft, The Netherlands 2. Materials Center Leoben Forschung GmbH, Roseggerstrasse 12, 8700, Leoben, Austria 3. Department of Materials Science, Montanuniversit ÅN at Leoben, Franz-Josef-Stra.e 18, 8700 Leoben, Austria

Faculty of Mechanical Engineering and Design Kaunas University of Technology, Kaunas, Lithuania

Faculty of Electronics, Photonics and Microsystems, Wroclaw University of Science and Technology, Wrocław 27 Wybrzeże Stanisława Wyspiańskiego st., Poland

Institute of Biomedical Mechatronics, Johannes Kepler University

Brandenburg University of Applied Sciences, Magdeburger Strasse 50, 14770 Brandenburg/Havel, Germany

Caen Normandy University, ENSICAEN, CNRS, Normandy Univ., GREYC, UMR6072, F-14000 Caen, France

1. Computer Science Department, University of Rome “La Sapienza”, Italy 2. Istituto per la Microelettronica e Microsistemi (IMM) Consiglio Nazionale delle Ricerche, Italy

1. Wrocław University of Science and Technology, Faculty of Electronics, Photonics and Microsystems, Janiszewskiego Str. 11/17, 50-372 Wrocław, Poland 2. Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi 980-8577, Japan

Wrocław University of Science and Technology, Faculty of Electronics, Photonics and Microsystems, Janiszewskiego Str. 11/17, 50-372 Wrocław, Poland

Czech Technical University in Prague, Department of Microelectronics, Technická 2, 16627 Praha 6, Czech Republic

1. Furtwangen University, Robert Gerwig-Platz 1, 78120 Furtwangen im Schwarzwald, Germany 2. West Pomeranian University of Technology, ul. Sikorskiego 37, 70-313 Szczecin, Poland 3. Associated to the Faculty of Engineering, University of Freiburg, Freiburg, Germany

University of Catania (DIEEI), Catania, Italy

School of Instrumentation Science and Optoelectronic Engineering, Beihang University, Beijing 100191, P. R. China

1. School of Instrumentation Science and Optoelectronic Engineering, Beihang University, Beijing 100191, P. R. China 2. Beijing Microelectronics Technology Institute, Beijing 100076,P. R. China

Department of Micro- and Nanosystems, ETH Zürich, 8006 Zürich, Switzerland

1. West Pomeranian University of Technology, Szczecin, al. Piastow 17, Poland 2. Furtwangen University, Robert-Gerwig-Platz 1, 78120, Germany

Department of Electrical Engineering and Information Technology, Technical University Dortmund, Otto-Hahn-Straße 8, 44227 Dortmund, Germany

1. School of Chemical Sciences, DCU Water Institute, Dublin City University, Glasnevin, Dublin 9, Ire-land, 2. Denmark Technical University, Denmark, 3. SINTEF, Norway

1. Swiss Federal Institute of Technology in Lausanne, 1015 Lausanne, Switzerland 2. Institute of Radiophysics and Electronics, Ashtarak, Armenia 3. MPSI, Paris-Saclay University, 91192 Gif-sur-Yvette, France

1. Department of Chemical Sciences and Technology, University of Rome “Tor Vergata”, Rome, 00133, Italy 2. Department of Chemical Engineering, Faculty of Advanced Technologies, Quchan Univesity of Technology, Quchan 94771-77870, Iran

1. Faculty of Chemistry, Nicolaus Copernicus University in Torun, Gagarina 7, 87-100 Torun, Poland 2. Faculty of Physics, Mathematics and Optometry, University of Latvia, 19 Raina Blvd., Riga, LV 1586, Latvia

Faculty of Electronics, Telecommunications and Informatics, Gdansk University of Technology, 11/12 Gabriela Narutowicza Street, Gdansk, 80-233, Poland

Wrocław University of Science and Technology, Faculty of Electronics, Photonics and Microsystems, Janiszewski Str. 11/17, 50-372 Wrocław, Poland

1. Nalecz Institute of Biocybernetics and Biomedical Engineering, Polish Academy of Sciences, Ks. Trojdena 4 St., 02-109 Warsaw, Poland, 2. Falsified Medicines and Medical Materials Department, National Medicines Institute, Chełmska 30/34 St., 00–725 Warsaw, Poland

1. Lucerne University of Applied Sciences, Switzerland 2. Graduate School for Cellular and Biomedical Sciences, University of Bern, Switzerland 3. University of Bern, ARTORG Center, Switzerland

1. Institute of Semiconductor Technology, Technische Universität Braunschweig, Hans-Sommer-Str. 66, 38106 Braunschweig, Germany 2. Laboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, Langer Kamp 6 a/b, 38106 Braunschweig, Germany

1. Aarhus University, Department of Biology, Ny Munkegade 116, 8000 Aarhus C, Denmark, 2. Aarhus University, Aarhus Institute of Advanced Studies, Høegh-Guldbergs Gade 6B, 8000 Aarhus C, Denmark

Department of Electrical, Electronic and Computer Engineering, University of Ulsan, 93 Daehak-ro, Nam-gu, Ulsan 680-749, South Korea

1. Fraunhofer EMFT, Hansastrasse 27d, 80686 Munich, Germany 2. Bundeswehr University Munich, Institute of Physics, Werner-Heisenberg-Weg 39, 85577 Neubiberg, Germany

1. School of Engineering, University of Warwick, Coventry CV4 7AL, United Kingdom 2. Paragraf, 7-8 West Newlands, Somersham, Cambridgeshire, England, PE28 3EB, United Kingdom

1. Department of Physics and Earth Science, University of Ferrara, Via Giuseppe Saragat 1/C, 44122 Ferrara, Italy 2. Institute for Microelectronics and Microsystems IMM-CNR, Via Gobetti 101, 40129 Bologna, Italy

1. Department of Thematic Studies and Environmental Change, TEMA M, Linköping university, Sweden 2. Current address: Department of Community Planning and Air Quality Unit, Swedish Meteorological, Hydrological Institute SMHI, Sweden

Lab for Measurement Technology, Saarland University, Saarbrücken, Germany

University of Latvia, 19 Raina Blvd., Riga, LV 1586, Latvia

Microsys lab, Department of Electrical Engineering and Computer Science, Liege University, Allée de la Découverte 10, 4000 Liège, Belgium

1. Department of Engineering, Reykjavik University, 102 Reykjavik, Iceland 2. Institute of Physics CSE, Silesian University of Technology, Konarskiego 22B, 44-100 Gliwice, Poland

1. Institute of Physics, Poznan University of Technology, ul. Piotrowo 3, 61-138 Poznan, Poland 2. Institute of Materials Research and Quantum Engineering, Poznan University of Technology, ul. Piotrowo 3, 61-138 Poznan, Poland

Silicon Austria Labs GmbH, Europastrasse 12, 9504 Villach, Austria

University of Ulsan, Ulsan, South Korea

1. Univ. Grenoble Alpes, Univ. Savoie Mont Blanc, CNRS, Grenoble INP, CROMA, F-38000 Grenoble, France. 2. Univ. Grenoble Alpes, CNRS, Grenoble INP, LMGP, F-38000 Grenoble, France

1. SINTEF Digital, Dep. Smart sensors and microsystems, Gaustadalléen 23c, 0373 Oslo, Norway 2. Elliptic Laboratories ASA, Hausmannsgate 21, 0182 Oslo, Norway

1. Chalmers University of Technology, Hörsalsvägen 7, 412 58 Göteborg, Sweden 2. Research institute of Sweden, Lindholmsallén 10, 417 55 Göteborg, Sweden 3. SSPA Sweden AB, Chalmers Tvärgata 10, 400 22 Göteborg, Sweden

1. Department of Naval Architecture, University of West Attica, Egaleo 122 43, Athens, Greece
2. microSENSES Laboratory, Department of Electrical and Electronics Engineering, University of West Attica, Egaleo 122 44, Athens, Greece

1. Department of Physics of the University of Naples “Federico II”, Italy, 80125 Naples, Italy
2. Institute STEMS of the National Research Council of Italy (CNR), 80125 Naples, Italy

1. University of Catania (DIEEI), Catania, Italy
2. Consiglio nazionale delle Ricerche (Istituto di Fisica Applicata "Nello Carrara"), Firenze, Italy
3. University of Salento (DiSTeBA), Lecce, Italy
4. University of Campania "Luigi Vanvitelli" (Department of Engineering), Aversa, Italy

1. Institute of Atomic Physics and Spectroscopy, University of Latvia, Jelgavas Str.3, Riga, Latvia
2. Center for Physical Sciences and Technology, Savanorių Ave. 231, Vilnius, Lithuania
3. MB „SensoGrafa”, Kiparisu G. 29, Didžiosios Riešės k, Lithuania

1. Department for Nanostructured Materials, Jožef Stefan Institute, Jamova cesta 39, SI-1000 Ljubljana, Slovenia
2. Jožef Stefan International Postgraduate School, Jamova cesta 39, SI-1000 Ljubljana, Slovenia

1. Univ. Bordeaux, CNRS, Bordeaux INP, IMS, UMR 5218 F-33405 Talence Cedex, France
2. Univ. Bordeaux, CNRS, Bordeaux INP, ICMCB, UMR 5026, F-33600 Pessac, France
3. SYMME, Univ. Savoie Mont Blanc, F74000 Annecy, France

1. Materials Center Leoben Forschung GmbH, Roseggerstrasse 12, 8700, Leoben, Austria
2. VSParticle, Oostsingel 209, 2612 HL, Delft, The Netherlands

1. College of Mechanical Engineering, Yangzhou University, Yangzhou 225127, PR China
2. Chimie des Interactions Plasma-Surface, University of Mons, 7000 Mons, Belgium

1. Department of Microsystems Engineering (IMTEK), Albert-Ludwigs-Universit at Freiburg, 79110 Freiburg im Breisgau, Germany
2. Infineon Technologies AG, 81549 Neubiberg, Germany
3. Fraunhofer Institute for Physical Measurement Techniques, 79110 Freiburg im Breisgau, Germany

1. Institute of Microelectronics of Barcelona (IMB-CNM, CSIC), Barcelona, Spain
2. University of Tunis El Manar, Faculty of Science, Tunis, Tunisia

1. MIND/IN2UB, Dept. of Electronics and Biomedical Engineering, University of Barcelona, Marti i Franqués 1, Barcelona, ES08028, Spain.
2. Institute of Semiconductor Technology (IHT), Laboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany.

1. Luxembourg Institute of Science and Technology, 41 rue du Brill, L4422, Belvaux, Luxembourg,
2. University of Brescia, Sensor lab, Department of Information Engineering, 38 Via Branze, 25123 Brescia, Italy
3. Sciosense Germany GmbH, Gerhard-Kindler-Straße 8, 72770 Reutlingen, Germany

1. São Paulo State University (UNESP), Rua Cristóvão Colombo 2265, 15054-000 São José do Rio Preto, Brazil
2. ETH Zurich, CH-8092 Zurich, Switzerland

1. Samovar, Télécom SudParis, Institut Polytechnique de Paris, Palaiseau, France
2. IMT Nord Europe, Institut Mines-Télécom, Univ. Lille, Center for Energy and Environment, Douai,France
3. Universidade Federal de Sergipe, UFS, São Cristóvão, Brazil

1. VSParticle, Oostsingel 209, 2612 HL, Delft, The Netherlands
2. Materials Center Leoben Forschung GmbH, Roseggerstrasse 12, 8700, Leoben, Austria
3. Department of Materials Science, Montanuniversit ÅN at Leoben, Franz-Josef-Stra.e 18, 8700 Leoben, Austria

Brandenburg University of Applied Sciences, Magdeburger Strasse 50, 14770 Brandenburg/Havel,
Germany

1. Computer Science Department, University of Rome “La Sapienza”, Italy
2. Istituto per la Microelettronica e Microsistemi (IMM) Consiglio Nazionale delle Ricerche, Italy

1. Wrocław University of Science and Technology, Faculty of Electronics, Photonics and Microsystems, Janiszewskiego Str. 11/17, 50-372 Wrocław, Poland
2. Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi 980-8577, Japan

1. Furtwangen University, Robert Gerwig-Platz 1, 78120 Furtwangen im Schwarzwald, Germany
2. West Pomeranian University of Technology, ul. Sikorskiego 37, 70-313 Szczecin, Poland
3. Associated to the Faculty of Engineering, University of Freiburg, Freiburg, Germany

1. School of Instrumentation Science and Optoelectronic Engineering, Beihang University, Beijing 100191, P. R. China
2. Beijing Microelectronics Technology Institute, Beijing 100076,P. R. China

1. West Pomeranian University of Technology, Szczecin, al. Piastow 17, Poland
2. Furtwangen University, Robert-Gerwig-Platz 1, 78120, Germany

1. School of Chemical Sciences, DCU Water Institute, Dublin City University, Glasnevin, Dublin 9, Ire-land,
2. Denmark Technical University, Denmark,
3. SINTEF, Norway

1. Swiss Federal Institute of Technology in Lausanne, 1015 Lausanne, Switzerland
2. Institute of Radiophysics and Electronics, Ashtarak, Armenia
3. MPSI, Paris-Saclay University, 91192 Gif-sur-Yvette, France

1. Department of Chemical Sciences and Technology, University of Rome “Tor Vergata”, Rome, 00133, Italy
2. Department of Chemical Engineering, Faculty of Advanced Technologies, Quchan Univesity of Technology, Quchan 94771-77870, Iran

1. Faculty of Chemistry, Nicolaus Copernicus University in Torun, Gagarina 7, 87-100 Torun, Poland
2. Faculty of Physics, Mathematics and Optometry, University of Latvia, 19 Raina Blvd., Riga, LV 1586, Latvia

1. Nalecz Institute of Biocybernetics and Biomedical Engineering, Polish Academy of Sciences, Ks. Trojdena 4 St., 02-109 Warsaw, Poland,
2. Falsified Medicines and Medical Materials Department, National Medicines Institute, Chełmska 30/34 St., 00–725 Warsaw, Poland

1. Lucerne University of Applied Sciences, Switzerland
2. Graduate School for Cellular and Biomedical Sciences, University of Bern, Switzerland
3. University of Bern, ARTORG Center, Switzerland

1. Institute of Semiconductor Technology, Technische Universität Braunschweig, Hans-Sommer-Str. 66, 38106 Braunschweig, Germany
2. Laboratory for Emerging Nanometrology (LENA), Technische Universität Braunschweig, Langer Kamp 6 a/b, 38106 Braunschweig, Germany

1. Aarhus University, Department of Biology, Ny Munkegade 116, 8000 Aarhus C, Denmark,
2. Aarhus University, Aarhus Institute of Advanced Studies, Høegh-Guldbergs Gade 6B, 8000 Aarhus C, Denmark

1. Fraunhofer EMFT, Hansastrasse 27d, 80686 Munich, Germany
2. Bundeswehr University Munich, Institute of Physics, Werner-Heisenberg-Weg 39, 85577 Neubiberg, Germany

1. School of Engineering, University of Warwick, Coventry CV4 7AL, United Kingdom
2. Paragraf, 7-8 West Newlands, Somersham, Cambridgeshire, England, PE28 3EB, United Kingdom

1. Department of Physics and Earth Science, University of Ferrara, Via Giuseppe Saragat 1/C, 44122 Ferrara, Italy
2. Institute for Microelectronics and Microsystems IMM-CNR, Via Gobetti 101, 40129 Bologna, Italy

1. Department of Thematic Studies and Environmental Change, TEMA M, Linköping university, Sweden
2. Current address: Department of Community Planning and Air Quality Unit, Swedish Meteorological, Hydrological Institute SMHI, Sweden

1. Department of Engineering, Reykjavik University, 102 Reykjavik, Iceland
2. Institute of Physics CSE, Silesian University of Technology, Konarskiego 22B, 44-100 Gliwice, Poland

1. Institute of Physics, Poznan University of Technology, ul. Piotrowo 3, 61-138 Poznan, Poland
2. Institute of Materials Research and Quantum Engineering, Poznan University of Technology, ul. Piotrowo 3, 61-138 Poznan, Poland

1. Univ. Grenoble Alpes, Univ. Savoie Mont Blanc, CNRS, Grenoble INP, CROMA, F-38000 Grenoble, France.
2. Univ. Grenoble Alpes, CNRS, Grenoble INP, LMGP, F-38000 Grenoble, France

1. SINTEF Digital, Dep. Smart sensors and microsystems, Gaustadalléen 23c, 0373 Oslo, Norway
2. Elliptic Laboratories ASA, Hausmannsgate 21, 0182 Oslo, Norway

1. Chalmers University of Technology, Hörsalsvägen 7, 412 58 Göteborg, Sweden
2. Research institute of Sweden, Lindholmsallén 10, 417 55 Göteborg, Sweden
3. SSPA Sweden AB, Chalmers Tvärgata 10, 400 22 Göteborg, Sweden

1. Institute of Sensor and Actuator Systems, TU Wien, Austria
2. Christian Doppler Laboratory for Piezoelectric Silicon MEMS with Enhanced Sensitivity and Responsivity, Institute of Sensor and Actuator Systems, TU Wien, Austria

1. Silicon Austria Labs GmbH, Sandgasse 34, 8010 Graz, Austria
2. Infineon Technologies AG Neubiberg, Am Campeon 1-15, 85579 Neubiberg, Germany

1. Silicon Austria Labs GmbH, Sandgasse 34, 8010 Graz, Austria,
2. EV Group E. Thallner GmbH, DI Erich Thallner Str. 1, 4782 St. Florian am Inn, Austria

1. Department for Integrated Sensor Systems, University for Continuing Education Krems, Viktor Kaplan Str. 2E, A2700 Wiener Neustadt
2. Institute of Sensor and Actuator Systems, Technische Universit ÅN at Wien,Gusshausstrasse 27-29, A1040 Vienna

1. Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, China
2. University of Chinese Academy of Sciences, Beijing 100049, China

1. State Key Laboratory of Transducer Technology, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100049, China，
2. School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences; Beijing 100049, China

1. University of Freiburg, Department of Microsystems Engineering - IMTEK, Georges-KÅN ohler-Allee 102,79110 Freiburg Germany
2. Endress+Hauser Flow Deutschland GmbH, Rosenauer Str. 27, 96450 Coburg, Germany

1. Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing, 100094, China
2. School of Electronic, Electrical and Communication Engineering, University of Chinese Academy ofSciences, Beijing, 100049, China

1. HUN-REN Centre for Energy Research, Konkoly-Thege str. 29-33., H-1121 Budapest, Hungary
2. HUN-REN SZTAKI, Kende u. 13-17., H-1111 Budapest, Hungary

1. Institute of Electrical Measurement and Sensor Systems, Inffeldgasse 23/II, A-8010 Graz, Austria
2. voestalpine Stahl GmbH, voestalpine-Stra.e 3, Linz, 4020, Austria

1. Institute of Electrical Measurement and Sensor Systems, Inffeldgasse 23/II, A-8010 Graz, Austria
2. Austrian Power Grid AG, Wagramerstra.e 19, A-1220 Vienna, Austria

1. Institute of Electrical Measurement and Sensor Systems, Graz University of Technology, Inffeldgasse 23/II, A-8010 Graz, Austria
2. Institute of Thermal Engineering, Graz University of Technology, Inffeldgasse 25B, A-8010 Graz, Austria

1. Department of Integrated Sensor Systems, University of Continuing Education Krems, Viktor Kaplan Stra.e 2 - Bauteil E, 2700 Wiener Neustadt, Austria
2. TU Wien, Karlsplatz 13, 1040 Vienna, Austria

1. SIAAP Direction des Laboratoires et de l’Environnement, Service Environnement, France
2. ELLONA SAS 3 Avenue Didier Daurat, 31400 Toulouse, France

1. Tyndall National institute, UCC, Cork, Ireland
2. UCD School of Agriculture and Food Science, University College Dublin, Belfield, D04 V1W8, Dublin, Ireland
3. UCD Conway Institute of Biomolecular and Biomedical Research, University College Dublin, Belfield, D04 V1W8, Dublin, Ireland

1. Nalecz Institute of Biocybernetics and Biomedical Engineering, Polish Academy of Sciences, Ks. Trojdena 4 St., 02-109 Warsaw, Poland,
2. Department of Surgical Oncology, Transplant Surgery and General Surgery, Medical University of Gdańsk, Poland

1. Nalecz Institute of Biocybernetics and Biomedical Engineering, Polish Academy of Sciences, Ks. Trojdena 4 St., 02-109 Warsaw, Poland,
2. Falsified Medicines and Medical Materials Department, National Medicines Institute, Chełmska 30/34 St., 00-725 Warsaw, Poland

1. Microsystems Lab., Inst. of Technical Physics and Materials Science, HUN-REN Centre for Energy Research, Budapest, Hungary
2. Óbuda University Doctoral School on Materials Sciences and Technologies, Budapest, Hungary
3. Uzsoki Hospital, Budapest, Hungary

1. UNSW Sydney, High St, Kensington, Sydney NSW, Australia
2. UNSW Canberra, Northcott Drive, Campbell ACT, Australia